Philips Photonics, the laser diode division of Philips and a provider of vertical cavity surface-emitting laser (VCSEL) devices, needed an equipment solution for wafer cleaning. In semiconductor manufacturing, the wafer cleaning process is a critical step. The most common wafer cleaning process is the RCA process, which involves several solvent cleaning steps to remove metal residues and other contaminants. The Solstice S4 machine provides a way to automate this multi-step process, saving time and cost.
Philips Photonics, which is currently being acquired by TRUMPF in the second quarter of 2019, produces VCSEL-based products for data communications, consumer and industrial applications, including security, surveillance, night vision and other sensing. Laser-based computer mice, high bit-rate optical cables, and VCSEL-based laser doppler technology have also been developed by the company.
The Solstice S4 Machine
The Solstice S4 is part of Solstice’s line of wet-processing tools. Its name is derived from its four chambers. ClassOne also makes an eight chamber wet-processing tool, called the Solstice S8, and a two chamber wet-processing tool, called the Solstice LT. The Solstice LT is used for semi-automated process development. Solstice designed the Solstice S4 for ≤200 mm wafers. These ≤200 mm wafers can be used in many emerging technologies. One specific example of the use of these ≤200 mm wafers is in compound semiconductors.
Solstice’s wet-processing tools, including the Solstice S4, have a 'Plating-Plus' multi process capability. According to ClassOne Group CEO, Bryon Exarcos, “Solstice initially built its reputation on quality electroplating, but with its capabilities, Solstice is now recognized as a multiprocessing tool that can handle everything from plating to wafer cleaning, high-pressure metal lift-off, resist strip, UBM etch and more.” This multiprocessing capability keeps equipment footprint low, a priority for Philips Photonics.
For more about semiconductor manufacturing, check out How Graphene Could Reduce the Cost of Semiconductor Wafers.